MKS Instruments Inc. introduced the High Cycle Valve, a small, light and durable vacuum valve for demanding applications where the cycle life is critical. Rated for 10,000,000 cycles, the compact valve greatly increases system uptime and minimizes maintenance costs. A new formed stainless steel bellows prevents outgassing, virtual leaks and particle entrapment, ensuring easy maintenance […]
vacuum valve
Ozone-Resistant Vacuum Valve For Harsh Semiconductor & Solar Processes
MKS Instruments, Inc., has introduced a series of Corrosion and Ozone Resistant Valves, designed for longer life in extremely harsh semiconductor or solar processes. The valves feature patented technology that completely seals off the valve bellows, keeping reactive and corrosive gases such as O3, NF3 and CL2 from contacting and collecting on the bellows surface […]