High Cycle Vacuum Valve Suited For 10 Million Cycles
MKS Instruments Inc. introduced the High Cycle Valve, a small, light and durable vacuum valve for demanding applications where the cycle life is critical. Rated for 10,000,000 cycles, the compact valve greatly increases system uptime and minimizes maintenance costs. A new formed stainless steel bellows prevents outgassing, virtual leaks and particle entrapment, ensuring easy maintenance and extending the cycle life of the valve.
The High Cycle Valve is available in angle, inline and internal-only configurations, for ease of integration into new tool designs. High flow port sizes, including NW25, NW40 and NW50, use maximum internal diameters for greater conductance. Internal configurations can be used to integrate directly into the product, such as a load lock chamber, reducing the footprint of new tools. The TIG fusion welded vacuum grade body creates fewer entrapment areas, resulting in less contamination build-up.
The High Cycle Valve is available with an air solenoid for electro-pneumatic control of the valve and a limit switch assembly for remote indication in the open or closed position. In the event of power loss, the valve will automatically close. For leak tight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, or Kalrez or Chemraz for higher temperature conditions and increased chemical resistance.
Ozone-Resistant Vacuum Valve For Harsh Semiconductor & Solar Processes
MKS Instruments, Inc., has introduced a series of Corrosion and Ozone Resistant Valves, designed for longer life in extremely harsh semiconductor or solar processes. The valves feature patented technology that completely seals off the valve bellows, keeping reactive and corrosive gases such as O3, NF3 and CL2 from contacting and collecting on the bellows surface when the valve is open. Extremely durable and dependable, the Corrosion and Ozone Resistant Valve has a small profile and is low in cost. The bellows-sealed poppet valve ensures high cycle life and easy maintenance.
The Corrosion Resistant Valve is available in angle and inline configurations, for ease of integration into new tool designs. High flow port sizes, including NW40 and NW50, use maximum internal diameters for greater conductance. For leak tight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, or Kalrez®, Chemraz® or Perlast® for higher temperature conditions and increased chemical resistance. The Corrosion and Ozone Resistant Valve is available in 6061 aluminum, and 304 and 316 stainless steel materials, to minimize corrosion. The TIG fusion welded vacuum grade body creates fewer entrapment areas, resulting in less contamination build-up.
The Corrosion Resistant Valve is available with an air solenoid for electro-pneumatic control of the valve and a limit switch assembly for remote indication in the open or closed position. In the event of power loss, the valve will automatically close.
Loading ...