Ozone-Resistant Vacuum Valve For Harsh Semiconductor & Solar Processes
MKS Instruments, Inc., has introduced a series of Corrosion and Ozone Resistant Valves, designed for longer life in extremely harsh semiconductor or solar processes. The valves feature patented technology that completely seals off the valve bellows, keeping reactive and corrosive gases such as O3, NF3 and CL2 from contacting and collecting on the bellows surface when the valve is open. Extremely durable and dependable, the Corrosion and Ozone Resistant Valve has a small profile and is low in cost. The bellows-sealed poppet valve ensures high cycle life and easy maintenance.
The Corrosion Resistant Valve is available in angle and inline configurations, for ease of integration into new tool designs. High flow port sizes, including NW40 and NW50, use maximum internal diameters for greater conductance. For leak tight operation, elastomer seals are available in Viton® for typical vacuum operating conditions, or Kalrez®, Chemraz® or Perlast® for higher temperature conditions and increased chemical resistance. The Corrosion and Ozone Resistant Valve is available in 6061 aluminum, and 304 and 316 stainless steel materials, to minimize corrosion. The TIG fusion welded vacuum grade body creates fewer entrapment areas, resulting in less contamination build-up.
The Corrosion Resistant Valve is available with an air solenoid for electro-pneumatic control of the valve and a limit switch assembly for remote indication in the open or closed position. In the event of power loss, the valve will automatically close.
Pneumatic Solenoid Valve Designed For Flow Factors of 9.1-14 Cv
The Spartan Scientific Series 4700 valves are 2 way, 2 position, normally open or normally closed, pilot diaphragm operated solenoid valves specifically designed for high flow, high pressure applications such as condensation removal, carwashes, autoclaves and irrigation control. These valves, with orifice sizes of 20mm to 25mm and port sizes of ¾” and 1.0″ NPT are offered with a standard manual override. Depending on port size, the 4700 operates in a pressure range of 4.5 to 220 psi and has a flow factor of 9.1Cv to 14Cv. The encapsulated coil is a quick connect DIN 43650 Form “A” design and is compatible with air, oil, gas, water and fuel. The 4700 has an ambient temperature range of -15°C to +50°C.
Spartan Scientific is certified to ISO 9001 with design. Complete specifications and options can be found at www.spartanscientific.com
